Varian HS-32
Pumping Speed: | 32,000 liters/sec Air (40,000 liters/sec He) |
Operating Range: | 8 X 10-4 to 5 X 10-8 torr (1 X 10-3 to 6.5 X 10-8 mbar) |
Warm Up Time: | 60 minutes |
Cool Down Time: | 180 minutes |
Fluid Charge: | 3 US Gallons (11.3 l;iters) |
Electrical Requirements: | 480 Volts, 50/60 Hz, 3 Phase |
Pump Power: | 24,000 watts |
Cooling Water Requirements | 4 gallons / minute (800 liters/hr) |